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Joan Vilà Comamala
Joan Vilà Comamala
Optoelectronics
Silicon
Lithography
Reactive-ion etching
Etching
5
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66
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Material Science in Semiconductor Processing
2019
Materials Science in Semiconductor Processing
L. Romano
Joan Vilà Comamala
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High aspect ratio silicon structures by Displacement Talbot lithography and Bosch etching.
2018
arXiv: Applied Physics
Konstantins Jefimovs
Lúcia Romano
Joan Vilà Comamala
Matias Kagias
Zhentian Wang
Li Wang
Christian Dais
Harun H. Solak
Marco Stampanoni
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Towards Sub-micrometer High Aspect Ratio X-ray Gratings by Atomic Layer Deposition of Iridium.
2018
arXiv: Applied Physics
Joan Vilà Comamala
Lúcia Romano
Vitaliy Guzenko
Matias Kagias
Marco Stampanoni
Konstantins Jefimovs
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Phase retrieval by coherent modulation imaging
2016
Nature Communications
Fucai Zhang
Bo Chen
Graeme R. Morrison
Joan Vilà Comamala
Manuel Guizar Sicairos
Ian K. Robinson
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Fabrication of Soft X-ray Diffractive Lenses with Resolution in the Nanometer Range
2008
Joan Vilà Comamala
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