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akira ki kitamura
akira ki kitamura
Optoelectronics
Materials science
Silicon oxide
Plasma processing
Etching
4
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Method of etching a silicon layer
2013
akira ki kitamura
eizi suzuki
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How selective removal of regions made up of silicon oxide and a plasma processing apparatus
2013
akira ki kitamura
hiroto ootake
eizi suzuki
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Bsp除去方法、bsp除去装置、基板処理装置、及び記憶媒体
2007
Tsutomu Hiroki
Akinori Kitamura
Isamu Sakuragi
Takehiro Shindo
akira ki kitamura
tutomu hiroki
takehiro sindou
isami sakuragi
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プラズマエッチング方法、プラズマエッチング装置、制御プログラム及びコンピュータ記憶媒体
2007
Mare Hirai
Masanobu Honda
Akinori Kitamura
Kumiko Yamazaki
akira ki kitamura
kumiko yama saki
mare hirai
masanobu honda
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