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Mircea V. Dusa
Mircea V. Dusa
IMEC
Extreme ultraviolet lithography
Materials science
Optoelectronics
Microscope
Optics
2
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The application of a Rapid Probe Microscope (RPM) for investigating 1D and 2D structures from EUV lithography
2020
Andrew D. L. Humphris
Alain Moussa
Mircea V. Dusa
Anne-Laure Charley
Elis Newham
Jenny Goulden
Lei Feng
Christopher Bevis
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Holistic litho, films and etch for EUV DRAM storage node pad (Conference Presentation)
2020
Cyrus Tabery
Nader Shamma
Nicola Kissoon
Elisabeth Camerotto
Mircea V. Dusa
Victor Blanco
Joost Bekaert
Rich Wise
Patrick Jaenen
Moyra McManus
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