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Nicola Kissoon
Nicola Kissoon
ASML Holding
Optoelectronics
Extreme ultraviolet lithography
Materials science
Dram
Extreme ultraviolet
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iN5 EUV single expose patterning evaluation for via & metal layers
2021
Argho Das
Victor Blanco
Sayantan Das
Nicola Kissoon
Sandip Halder
Mircea Dusa
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Holistic litho, films and etch for EUV DRAM storage node pad (Conference Presentation)
2020
Cyrus Tabery
Nader Shamma
Nicola Kissoon
Elisabeth Camerotto
Mircea V. Dusa
Victor Blanco
Joost Bekaert
Rich Wise
Patrick Jaenen
Moyra McManus
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