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Lut Van Acker
Lut Van Acker
Polymer
Chemical-mechanical planarization
Materials science
Composite material
1
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4
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Surface planarization of Cu and CuNiSn Micro-bumps embedded in polymer for below 20μm pitch 3DIC applications
2016
Inge De Preter
Jaber Derakhshandeh
Nancy Heylen
Lut Van Acker
Kenneth June Rebibis
Andy Miller
Gerald Beyer
Eric Beyne
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