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Surface planarization of Cu and CuNiSn Micro-bumps embedded in polymer for below 20μm pitch 3DIC applications
Surface planarization of Cu and CuNiSn Micro-bumps embedded in polymer for below 20μm pitch 3DIC applications
2016
Inge De Preter
Jaber Derakhshandeh
Nancy Heylen
Lut Van Acker
Kenneth June Rebibis
Andy Miller
Gerald Beyer
Eric Beyne
Keywords:
Polymer
Chemical-mechanical planarization
Materials science
Composite material
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