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Chia Hwa Shiao
Chia Hwa Shiao
Reticle
Wafer fabrication
Optoelectronics
Wafer
Contamination
1
Papers
4
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Evaluation, reduction, and monitoring of progressive defects on 193-nm reticles for low-k1 process
2004
Chia Hwa Shiao
Chien-Chung Tsai
Tony Hsu
Steve Tuan
Doris Chang
Richard Chen
Frank Hsieh
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Citations (4)
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