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Hyeong-Chan Ko
Hyeong-Chan Ko
Etching
Plasma processing
Plasma
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New process damage during the etching of small-contact on long floating conductor layer
2003
IRPS | International Reliability Physics Symposium
Jin-Kee Choi
Donggun Park
Hong-Joon Moon
Sanghyok Lee
Hyeong-Chan Ko
Kihoon Yang
Wonshik Lee
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