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Aritoshi Sugimoto
Aritoshi Sugimoto
Renesas Electronics
Analytical chemistry
Electronic engineering
Materials science
Design for testing
Optical microscope
4
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26
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ホットスポット絞り込み装置、ホットスポット絞り込み方法、ホットスポット絞り込みプログラム、ホットスポット検査装置、および、ホットスポット検査方法
2007
Koji Arai
Tomohiro Funakoshi
Norio Hasegawa
Shinji Kubo
Shigeki Kurihara
Ryoichi Matsuoka
Hideo Sakai
Aritoshi Sugimoto
sinzi kubo
kouzi arai
ari syun sugimoto
ryouiti matuoka
eiyuu sakae i
sigeki kurihara
tomohiro funakosi
noboru osu hasegawa
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An advanced defect-monitoring test structure for electrical screening and defect localization
2004
IEEE Transactions on Semiconductor Manufacturing
Yuichi Hamamura
Takayuki Kumazawa
Kazuyuki Tsunokuni
Aritoshi Sugimoto
Hisao Asakura
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Citations (17)
Defect reduction in Cu dual damascene process using short-loop test structures
2003
ISSM | International Symposium on Semiconductor Manufacturing
Hiroshi Nagaishi
Munetoshi Fukui
Hisao Asakura
Aritoshi Sugimoto
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Citations (7)
An advanced defect-monitoring test structure for electrical measurements and defect localization
2003
ICMTS | International Conference on Microelectronic Test Structures
Yuichi Hamamura
Takayuki Kumazawa
Kazuyuki Tsunokuni
Aritoshi Sugimoto
Hisao Asakura
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Citations (2)
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