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SangIee Lee
SangIee Lee
SK Hynix
Wafer
Lithography
Dram
Reticle
Computer vision
2
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Evaluation of litho printability of DRAM contact hole patterns with various programmed defects
2007
Kangjoon Seo
SangIee Lee
HyunYoung Kim
DaeHo Hwang
Sangpyo Kim
Goomin Jeong
Oscar Han
Chunlin Chen
David Yee
EunJi Kim
KiHun Park
NamWook Kim
Sunny Choi
David Kim
Shrinkant Lohokare
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KrF attenuated PSM defect printability and detectability for 120nm actual DRAM patterning process
2001
Juhwan Kim
Sangchul Kim
Hee Chun Kim
SangIee Lee
Yongkyoo Choi
Young Mog Ham
Oscar Han
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