Old Web
English
Sign In
Acemap
>
authorDetail
>
Jiroh Itoh
Jiroh Itoh
Mitsubishi Electric
X-ray lithography
Ashing
Photolithography
Photoresist
Lithography
1
Papers
9
Citations
0.00
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (1)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Extension of KrF lithography to sub-50-nm pattern formation
2000
Shuji Nakao
Jiroh Itoh
Akihiro Nakae
Itaru Kanai
Takayiki Saitoh
H. Matsubara
Kouichirou Tsujita
Ichiriou Arimoto
Wataru Wakamiya
Show All
Source
Cite
Save
Citations (9)
1