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Sang-Sool Koo
Sang-Sool Koo
SK Hynix
Photolithography
Engineering
Materials science
Lithography
Optics
8
Papers
3
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0
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2024
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Study on the potentialities of sub-100nm optical lithography of alternating and phase-edge phase shift mask for ArF lithography
2001
Sang-Sool Koo
Hee-Bom Kim
Hyoung-Soon Yune
Jee-Suk Hong
Seung-Weon Paek
Tae-Seung Eom
Chang-Nam Ahn
Young-Mog Ham
Ki-Ho Baik
Kyu-Yong Lee
Lee-Ju Kim
Hong-Seok Kim
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Potentialities of sub-100-nm optical lithography of alternating and phase-edge phase-shift mask for ArF lithography
2001
Sang-Sool Koo
Hee-Bom Kim
Hyoung-Soon Yune
Jee-Suk Hong
Seung-Weon Paek
Tae-Seung Eom
Chang-Nam Ahn
Young-Mog Ham
Ki-Ho Baik
Kyu-Yong Lee
Lee-Ju Kim
Hong-Seok Kim
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Mask critical dimension error on optical lithography
2000
Tae-Seung Eom
Sang-Sool Koo
Seung-Weon Paek
Hee-Bom Kim
Chang-Nam Ahn
Ki-Ho Baik
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