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Thomas Prüfer
Thomas Prüfer
Helmholtz-Zentrum Dresden-Rossendorf
Decomposition
Chemical physics
Condensed matter physics
Thermal
Ion
2
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Computer modeling of single-layer nanocluster formation in a thin SiO2 layer buried in Si by ion mixing and thermal phase decomposition
2019
Journal of Applied Physics
Thomas Prüfer
Wolfhard Möller
Karl Heinz Heinig
Daniel Wolf
Hans-Jürgen Engelmann
Xiaomo Xu
Johannes von Borany
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Formation of Meta-Stable SiOx in a 3D Nanoscale Volume by Ion Beam Mixing for Self-Assembly of a Single Si Quantum Dot
2016
Christoffer Fridlund
Kai Nordlund
Flyura Djurabekova
Thomas Prüfer
Karl Heinz Heinig
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