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Dry etching
Deep reactive-ion etching
Semiconductor device
Aspect ratio (aeronautics)
Etching
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ディープ・トレンチ・シリコン・エッチングの反応性イオン・エッチング・ラグを低減する方法
2001
Byeong Y. Kim
Stephan Kudelka
Brian S. Lee
Hong Li
Gangadhara S. Mathad
Elizabeth Morales
Munir D. Naeem
Young-Jin Park
Rajiv M. Ranade
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Method for etching a high aspect ratio trenches into the semiconductor device
2001
erizabesu moraaresu
gangadara esu matado
sutiibun pii kuderuka
byon yoru kimu
buraian esu rii
hon rii
muniiru dii naiimu
yonzin paku
raziivu emu ranaade
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