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Daniel Haefliger

Technical University of Denmark

19

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400

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Fabrication of thin SU-8 cantilevers: initial bending, release and time stability

2010 Journal of Micromechanics and Microengineering
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Autonomous valve for detection of biopolymer degradation

2009 SENSORS | IEEE Sensors
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Fabrication of micro-mechanical sensors with the polymer SU-8

2009
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Microcantilever Array Devices

2008
- Daniel Haefliger
- Anja Boisen
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Processing of thin SU-8 films

2008 Journal of Micromechanics and Microengineering
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Rapid molecular detection of food- and waterborne diseases

2008
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SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods

2008 Sensors
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Optimized SU-8 processing for the fabrication of thin polymer cantilevers

2007
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Optimized plasma-deposited fluorocarbon coating for dry release and passivation of thin SU-8 cantilevers

2007 Journal of Vacuum Science & Technology B
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Sensor system with a color indicator releasing driven structure

2006
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