Microcantilever Array Devices

A descendant of the atomic force microscope invented in 1986, the microcantilever array device has to date attracted the interest of many researchers. The sensor system relies on nanomechanical transduction schemes enabling extremely sensitive detection of vapors, biomolecules, and microorganisms. Three different operation modes are discussed here: the use of the microarray as (i) a strain gauge, where the analyte induces a change in surface stress upon interaction with the array, (ii) a microbalance measuring minute mass changes in the zeptogram regime, and (iii) a calorimeter, detecting heat absorbed or released by a chemical reaction. Applications of these sensors in the field of process and quality control, biosensing, medical diagnostics, molecular recognition, and proteomics will be discussed. Keywords: cantilever; microtechnology; surface stress; microbalance; resonance; calorimeter; self-assembled monolayer (SAM); DNA; antigen; cell