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Haruo Tsuchikawa

6

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21

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Electron Beam Direct Writing technology for LSI prototyping business

2010 Microelectronic Engineering
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Design for electron beam: A novel approach to electron beam direct writing throughput enhancement for volume production

2009 Journal of Vacuum Science & Technology B
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E-Beam Technology : Breaks Through Complex Design Cycles

2009
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Study of Stress Migration Failure in SiLK™/SiO2 Hybrid Cu Interconnects

2004
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Damageless H2)/SiH4 Plasma-CVD for gate SiO2

1993
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