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Haruyuki Tago
Haruyuki Tago
CMOS
Gate array
Electronic engineering
Materials science
Optoelectronics
2
Papers
2
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0
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Design for electron beam: A novel approach to electron beam direct writing throughput enhancement for volume production
2009
Journal of Vacuum Science & Technology B
Takashi Maruyama
Yasuhide Machida
Shinji Sugatani
Haruo Tsuchikawa
Hiromi Hoshino
Masaru Ito
Haruyuki Tago
Larry L. Chau
Shone Lee
Hideaki Komami
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Citations (2)
THPM 12.6: A 2OK-Gate CMOS Gate Array
1982
Haruyuki Tago
Tamotsu Hiwatashi
Shohei Shima
Takahiko Moriva
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