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A. Humbert
A. Humbert
Katholieke Universiteit Leuven
Dielectric
Chemical vapor deposition
Porosity
Analytical chemistry
Ultraviolet
2
Papers
72
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Air gap formation by UV-assisted decomposition of CVD material
2008
Microelectronic Engineering
Marianna Pantouvaki
A. Humbert
E VanBesien
Elisabeth Camerotto
Youssef Travaly
O. Richard
M. Willegems
Henny Volders
Kristof Kellens
R. Daamen
R.J.O.M. Hoofman
Gerald Beyer
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Citations (12)
Comparison Between E-beam and Ultraviolet Curing to Perform Porous a-SiOC : H
2007
Journal of The Electrochemical Society
V. Jousseaume
Aziz Zenasni
Laurent Favennec
G. Gerbaud
Michel Bardet
J.P. Simon
A. Humbert
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Citations (60)
1