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E VanBesien
E VanBesien
Katholieke Universiteit Leuven
Dielectric
Materials science
Chemical vapor deposition
Analytical chemistry
Chemical-mechanical planarization
3
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58
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Air gap formation by UV-assisted decomposition of CVD material
2008
Microelectronic Engineering
Marianna Pantouvaki
A. Humbert
E VanBesien
Elisabeth Camerotto
Youssef Travaly
O. Richard
M. Willegems
Henny Volders
Kristof Kellens
R. Daamen
R.J.O.M. Hoofman
Gerald Beyer
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Citations (12)
Ab initio conformational study of caffeic acid
2003
Journal of Molecular Structure-theochem
E VanBesien
M. P. M. Marques
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Citations (45)
1