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Paul Smith
Paul Smith
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Plasma-enhanced chemical vapor deposition
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Source de plasma pour nettoyage de chambre et processus
2009
Dmitry Lubomirsky
Jang Gyoo Yang
Qiwei Liang
Matthew L. Miller
James Santosa
Xinglong Chen
Paul Smith
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Plasma auto-ionise et inductif pour pulverisation et repulverisation cathodiques
2002
Darryl Angelo
Daniel A. Carl
Fusen Chen
Barry Chin
Peijun Ding
John C. Forster
Jianming Fu
Praburam Gopalraja
Nirmalya Maity
Roderick Craig Mosely
Suraj Rengarajan
Paul Smith
Xianmin Tang
Anish Tolia
Zheng Xu
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Reactor operated for radio frequency plasma-enhanced chemical vapor deposition process and
1999
S. Gurtej Sandhu
Sujit Sharan
Paul Smith
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Verfahren und Vorrichtung zum Reinigen unter Anwendung von chlorhaltigem Gasplasma
1998
Mei Chang
Xiao Liang
Lee Luo
Talex Sajoto
Paul Smith
Jia-Xiang Wang
Stefan Wolff
Jun Zhao
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