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Dieter SchmeiíEr
Dieter SchmeiíEr
Analytical chemistry
Crystal growth
Nanotechnology
Sheet resistance
Tantalum carbide
1
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5
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Interface engineering for the TaN/Ta barrier film deposition process to control Ta-crystal growth
2013
Microelectronic Engineering
Lukas Gerlich
S. Ohsiek
Christoph Klein
Mario Geií
Michael Friedemann
Peter Kücher
Dieter SchmeiíEr
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Citations (5)
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