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Benjamin Oudet
Benjamin Oudet
STMicroelectronics
Ion implantation
Short-channel effect
Germanium
Carbon
PMOS logic
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Germanium a Carbon Co-implantation for Enhanced Short Channel Effect Control in PMOS Devices
2006
MRS Proceedings
B. Dumont
A. Pouydebasque
Bartek Pawlak
Benjamin Oudet
D. Delille
Frédéric Milesi
Kader Souifi
T. Skotnicki
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