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Arthur D. Klaum

KLA-Tencor

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A new methodology to specify via and contact layer reticles for maximizing process latitude

2003
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Defect dispositioning in a reticle qualification process

2002
- Mark A. Hawkins
- Arthur D. Klaum
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Reticle defect printability: their impact on yield and feedback to suppliers

2002
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Citations (2)