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Carlos Mata
Carlos Mata
Infineon Technologies
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Metrology
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Wafer current measurement for process monitoring
2005
Advanced Semiconductor Manufacturing Conference
Dmitry Shur
Alexander Kadyshevitch
Jeremy Zelenko
Carlos Mata
Victor Verdugo
Pierre-Yves Guittet
Brian Starr
Craig Duncan
Stefano Ventola
Jan Klinger
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Wafer current measurement for process monitoring
2004
ASMC | Advanced Semiconductor Manufacturing Conference
Dmitry Shur
Alexander Kadyshevitch
Jeremy Zelenko
C Duncan
Carlos Mata
B Starr
Stefano Ventola
J. Klinger
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Advanced structural process monitoring, using in-line FIB
2004
ASMC | Advanced Semiconductor Manufacturing Conference
H. Bloess
Carlos Mata
Jeremy Zelenko
J Levin
S. Keisari
J. Klinger
Stefano Ventola
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