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Dmitry Shur
Dmitry Shur
Applied Materials
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Development environment
Engineering
Limiting
Wafer
3
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1
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Wafer current measurement for process monitoring
2005
Advanced Semiconductor Manufacturing Conference
Dmitry Shur
Alexander Kadyshevitch
Jeremy Zelenko
Carlos Mata
Victor Verdugo
Pierre-Yves Guittet
Brian Starr
Craig Duncan
Stefano Ventola
Jan Klinger
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Wafer current measurement for process monitoring
2004
ASMC | Advanced Semiconductor Manufacturing Conference
Dmitry Shur
Alexander Kadyshevitch
Jeremy Zelenko
C Duncan
Carlos Mata
B Starr
Stefano Ventola
J. Klinger
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Metrologie d'ouvertures de contact
2004
Alexander Kadyshevitch
Christopher G. Talbot
Dmitry Shur
Andreas G. Hegedus
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