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R.W. Moss

Battelle Memorial Institute

6

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Microhardness and other properties of hydrogenated amorphous silicon carbide thin films formed by plasma-enhanced chemical vapor deposition

1983 Thin Solid Films
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Sputter deposition with a nearly parallel coating flux

1981 Thin Solid Films
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Recent advances in materials synthesis by sputter deposition

1981 Thin Solid Films
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A method for preparing sputter-deposited films with improved microstructures☆

1981 Thin Solid Films
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Krypton entrapment in pulse biased sputter-deposited metals

1978 Thin Solid Films
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Citations (6)