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Massimo D Pirnaci
Massimo D Pirnaci
STMicroelectronics
JFET
Etching (microfabrication)
MOSFET
Trench
Power semiconductor device
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Systematic Characterization of Plasma-Etched Trenches on 4H-SiC Wafers.
2021
Massimo D Pirnaci
Luca Spitaleri
Dario Tenaglia
Francesco Perricelli
Maria Elena Fragalà
Corrado Bongiorno
Antonino Gulino
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