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M.E. Reuhman-Huisken
M.E. Reuhman-Huisken
Resist
Kinetics
Silylation
Chemical engineering
Materials science
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Mechanism and kinetics of silylation of resist layers from the gas phase
1987
Robert Jan Visser
Jack P. W. Schellekens
M.E. Reuhman-Huisken
L.J. Van Ijzendoorn
M. J. Bowden
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