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Mechanism and kinetics of silylation of resist layers from the gas phase
Mechanism and kinetics of silylation of resist layers from the gas phase
1987
Robert Jan Visser
Jack P. W. Schellekens
M.E. Reuhman-Huisken
L.J. Van Ijzendoorn
M. J. Bowden
Keywords:
Resist
Kinetics
Silylation
Chemical engineering
Materials science
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