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Kohei Asano
Kohei Asano
Nagoya University
Plasma
Ion
Photochemistry
Chemistry
Analytical chemistry
3
Papers
25
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In Situ Analysis of Plasma-Induced Modification on Porous SiOCH Films
2011
The Japan Society of Applied Physics
Hiroshi Yamamoto
Kohei Asano
K. Ishikawa
Kazuki Takeda
Hiroki Kondo
M. Sekine
Masaru Hori
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Chemical bond modification in porous SiOCH films by H2 and H2/N2 plasmas investigated by in situ infrared reflection absorption spectroscopy
2011
Journal of Applied Physics
Hiroshi Yamamoto
Kohei Asano
Kenji Ishikawa
Makoto Sekine
Hisataka Hayashi
Itsuko Sakai
Tokuhisa Ohiwa
Keigo Takeda
Hiroki Kondo
Masaru Hori
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Modification of Si-O-Si Structure in Porous SiOCH Low-$k$ Films with Ions, Radicals, and VUV Radiation in O$_{2}$ Plasma
2010
Bulletin of the American Physical Society
Hiroshi Yamamoto
Kohei Asano
Keigo Takeda
Kenji Ishikawa
Hiroki Kondo
Makoto Sekine
Masaru Hori
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