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In Situ Analysis of Plasma-Induced Modification on Porous SiOCH Films
In Situ Analysis of Plasma-Induced Modification on Porous SiOCH Films
2011
Hiroshi Yamamoto
Kohei Asano
K. Ishikawa
Kazuki Takeda
Hiroki Kondo
M. Sekine
Masaru Hori
Keywords:
Plasma
Analytical chemistry
Porosity
Nanotechnology
Materials science
Chemical engineering
in situ analysis
Correction
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