Old Web
English
Sign In
Acemap
>
authorDetail
>
tetuya takagaki
tetuya takagaki
Wafer
Semiconductor
Materials science
Optoelectronics
Semiconductor device fabrication
3
Papers
0
Citations
0
KQI
Citation Trend
Filter By
Interval:
1900~2024
1900
2024
Author
Papers (3)
Sort By
Default
Most Recent
Most Early
Most Citation
No data
Journal
Conference
Others
Semiconductor thermal treatment device
1992
Shigeki Hirasawa
Tetsuya Takagaki
Yoji Tsuchiyama
Toshiyuki Uchino
Tomoji Watanabe
tosiyuki naiya
hirosi tutiyama
sigeki hirasawa
satosi watanabe
tetuya takagaki
Show All
Source
Cite
Save
Citations (0)
不純物導入,拡散プロセスにおける熱的問題 : 半導体デバイスの製造技術
1986
Journal of the Society of Mechanical Engineers, Japan
takuzi torii
tetuya takagaki
Show All
Source
Cite
Save
Citations (0)
Semiconductor wafer heating device
1984
sigekazu kieda
takeo tanaka
tetuya takagaki
Show All
Source
Cite
Save
Citations (0)
1