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Claude Delmas
Claude Delmas
Sputtering
Optoelectronics
Cathode
Materials science
cathode sputtering
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Target element for cathode sputtering, process for the preparation of said element and target, including large surface area, made from this element.
1991
Guy Campet
Jean-Michel Chabagno
Claude Delmas
Joseph Portier
Jean Salardenne
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