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Marco M. Weber
Marco M. Weber
ETH Zurich
Materials science
Drop (liquid)
Optics
Laser
Irradiation
5
Papers
9
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0
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Non-axisymmetric droplet irradiation effects on ion and extreme ultraviolet light emission of laser-produced plasma light sources
2021
Journal of Applied Physics
Markus Brandstätter
Marco M. Weber
Reza S. Abhari
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Dimer organization of membrane-associated NS5A of hepatitis C virus as determined by highly sensitive 1H-detected solid-state NMR.
2020
Angewandte Chemie
Vlastimil Jirasko
Alons Lends
Nils-Alexander Lakomek
Marie-Laure Fogeron
Marco M. Weber
Alexander A. Malär
Susanne Penzel
Ralf Bartenschlager
Beat H. Meier
Anja Böckmann
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Impact of droplet properties and Nd:YAG laser characteristics on the angular distribution of EUV radiation of a LPP EUV light source for HVM EUV mask and blank inspection
2019
Marco M. Weber
Markus Brandstätter
Duane Hudgins
Jeremy B. Nickol
Reza S. Abhari
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Droplet-based LPP Light Source for Actinic Patterned Mask Inspection for High Volume Manufacturing
2018
Markus Brandstätter
Marco M. Weber
Duane Hudgins
Jeremy B. Nickol
Flori Alickaj
Reza S. Abhari
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Improved cost-of-ownership for a droplet-based LPP light source for HVM EUV mask and blank inspection (Conference Presentation)
2017
Markus Brandstätter
Marco M. Weber
Duane Hudgins
Jeremy B. Nickol
Flori Alickaj
Reza S. Abhari
Paolo A. Gargini
Kurt G. Ronse
Patrick P. Naulleau
Toshiro Itani
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