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Jeremy B. Nickol
Jeremy B. Nickol
ETH Zurich
Drop (liquid)
Optics
Materials science
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Extreme ultraviolet lithography
3
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Impact of droplet properties and Nd:YAG laser characteristics on the angular distribution of EUV radiation of a LPP EUV light source for HVM EUV mask and blank inspection
2019
Marco M. Weber
Markus Brandstätter
Duane Hudgins
Jeremy B. Nickol
Reza S. Abhari
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Droplet-based LPP Light Source for Actinic Patterned Mask Inspection for High Volume Manufacturing
2018
Markus Brandstätter
Marco M. Weber
Duane Hudgins
Jeremy B. Nickol
Flori Alickaj
Reza S. Abhari
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Improved cost-of-ownership for a droplet-based LPP light source for HVM EUV mask and blank inspection (Conference Presentation)
2017
Markus Brandstätter
Marco M. Weber
Duane Hudgins
Jeremy B. Nickol
Flori Alickaj
Reza S. Abhari
Paolo A. Gargini
Kurt G. Ronse
Patrick P. Naulleau
Toshiro Itani
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