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E. Alers
E. Alers
Electronic engineering
Passivation
Inductively coupled plasma
Analytical chemistry
Nitride
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Novel Nitride Passivation on 0.15 Pm Pseudomorphic GaAs HEMTs Using High-Density Inductively Coupled Plasma CVD (HD-ICP-CVD)
2002
Y.C. Chou
R. Lai
G. P. Li
P. Nam
H.K. Kim
Y. Ra
R. Grundbacher
E. Alers
M. Barsky
M. Biedenbender
A. Oki
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