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Yasushi Ebizuka
Yasushi Ebizuka
Hitachi
Metrology
Computer science
Optics
Extreme ultraviolet lithography
Electronic engineering
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Multivariate analysis methodology for the study of massive multidimensional SEM data
2021
Mohamed Saib
Gian Lorusso
Anne-Laure Charley
Philippe Leray
Tsuyoshi Kondo
Yuta Kawamoto
Yasushi Ebizuka
Naoma Ban
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High-accuracy, high-speed, and smart metrology in the EUV era
2020
Zhigang Wang
Kei Sakai
Yasushi Ebizuka
Masumi Shirai
Makoto Suzuki
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