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Naoma Ban
Naoma Ban
Hitachi
Optics
Beam (structure)
Analytical chemistry
Metrology
Computer science
4
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3
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0
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Massive metrology and inspection solution for EUV by area inspection SEM with machine learning technology
2021
Tsuyoshi Kondo
Naoma Ban
Yasushi Ebizuka
Yasutaka Toyoda
Yukari Yamada
Taeko Kashiwa
Hirohito Koike
Hiroyuki Shindo
Anne-Laure Charley
Mohamed Saib
Frieda Van Roey
Peter De Bisschop
Danilo De Simone
Christophe Beral
Gian Francesco Lorusso
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Multivariate analysis methodology for the study of massive multidimensional SEM data
2021
Mohamed Saib
Gian Lorusso
Anne-Laure Charley
Philippe Leray
Tsuyoshi Kondo
Yuta Kawamoto
Yasushi Ebizuka
Naoma Ban
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Study of void observation technique using scanning electron microscopy
2013
Microelectronic Engineering
Satoshi Takada
Naoma Ban
Takayuki Hoshino
Naomasa Suzuki
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Measurements of Variable-Shaped Electron Beams with Solid-State Detector and Scattering Aperture
2007
Japanese Journal of Applied Physics
Makoto Sakakibara
Hiroya Ohta
Tadashi Kanosue
Yasunari Sohda
Naoma Ban
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Citations (3)
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