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Jens Heinrich
Jens Heinrich
Chemnitz University of Technology
Chemical vapor deposition
Electron microprobe
Gas chromatography
Infrared spectroscopy
Methyltrichlorosilane
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Analytics of CVD Processes in the Deposition of SiC by Methyltrichlorosilane
2000
Mikrochimica Acta
Jens Heinrich
Steffen Hemeltjen
G. Marx
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Citations (23)
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