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Maxim Golovinskiy

National Research University of Electronic Technology

6

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3

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Research and Modeling of Heat Exchange Module of Plasma-Chemical Processing

2020 EIConRus | IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering
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Correction factor calculation for photomasks in a flexible microassemblies production

2018 EIConRus | IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering
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Development of MEMS-accelerometer capacitive sensitive element with a variable acceleration range up to 20000g

2018 EIConRus | IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering
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Comb structure analysis of the capacitive sensitive element in MEMS-accelerometer

2015 Proceedings of SPIE
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Measurement of Capacitive Accelerometer with Decreased Nonlinearity of Static Characteristic

2015
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