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Hajime Shirakawa

7

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5

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Surface preparation and wet cleaning for Germanium surface

2017 EDTM | IEEE Electron Devices Technology and Manufacturing Conference
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Dual-Fluid Spray Process for Particle and Fluorocarbon-Polymer Removal in BEOL Applications

2015
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Oxygen Control Challenge for Advanced Wet Processing

2015
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Effect of Dissolved Oxygen for Advanced Wet Processing

2014 Solid State Phenomena
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Cleaning and Surface Preparation for SiGe and Ge Channel Device

2012 Solid State Phenomena
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