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Hideyuki Kito
Hideyuki Kito
Dielectric
Electronic engineering
Copper
Interconnection
Optoelectronics
4
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4
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Dispositif a semi-conducteur et procede de production du dispositif
2001
Takeshi Nogami
Naoki Komai
Hideyuki Kito
Mitsuru Taguchi
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Tungsten via poisoning caused by water trapped in embedded organic low-K dielectrics
2000
IITC | International Interconnect Technology Conference
Koichi Ikeda
Toshiaki Hasegawa
Kazuhiro Tokunaga
Masanaga Fukasawa
Hideyuki Kito
Takaaki Miyamoto
Shingo Kadomura
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A Reliable Interconnection Technology Using Organic Low-K Dielectrics for 0.18 μm CMOS Circuit
1999
The Japan Society of Applied Physics
Kazuhiko Tokunaga
Koichi Ikeda
Takaaki Miyamoto
Toshiaki Hasegawa
Masanaga Fukasawa
Hideyuki Kito
Shingo Kadomura
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Copper dual damascene interconnects with low-K (K/sub eff/<3.0) dielectrics using FLARE/sup TM/ and an organo-silicate hard mask
1999
IEDM | International Electron Devices Meeting
Toshiaki Hasegawa
Koichi Ikeda
K. Tokunaga
I. Yamamura
K. Fukasawa
Hideyuki Kito
K. Miyata
Naoki Komai
Mitsuru Taguchi
S Hirano
T. Tatsumi
Shingo Kadomura
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Citations (4)
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