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Paul C. Uzhoma
Paul C. Uzhoma
Optoelectronics
Lithography
Reflectivity
Materials science
X-ray optics
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Multilayer Reflective Coatings for BEUV Lithography: A Review
2021
Paul C. Uzhoma
Salman Shabir
Huan Hu
Paul C. Okonkwo
Oleksiy V. Penkov
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