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Joe R. Naunguyan
Joe R. Naunguyan
Laser
Materials science
Optoelectronics
X-ray lithography
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3
Papers
2
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0
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Compact high power laser-plasma X-ray source for lithography
2001
MNC | International Microprocesses and Nanotechnology Conference
Celestino J. Gaeta
Harry Rieger
I C E Turcu
Richard Alan Forber
S. M. Campeau
Kelly L. Cassidy
Michael F. Powers
Robert K. Grygier
Juan R. Maldonado
G. French
Joe R. Naunguyan
C. Kelsy
Peter Hark
James H. Morris
Richard M. Foster
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Compact high-power laser-plasma x-ray source for lithography
2001
International Microprocesses and Nanotechnology Conference
Celestino J. Gaeta
Harry Rieger
I. C. Edmond Turcu
Richard Alan Forber
S. M. Campeau
Kelly L. Cassidy
Michael F. Powers
Robert K. Grygier
Juan R. Maldonado
G. French
Joe R. Naunguyan
Charles Kelsy
Peter Hark
James H. Morris
Richard M. Foster
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Microfocus soft x-ray source generated by a compact high-power laser plasma
2000
I. C. Edmond Turcu
Harry Rieger
Yuli Vladimirsky
Robert K. Grygier
Michael F. Powers
Joe R. Naunguyan
S. M. Campeau
G. French
Richard Alan Forber
Richard M. Foster
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Citations (2)
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