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S Hosoki
S Hosoki
Hitachi
Optics
X-ray lithography
Field electron emission
Analytical chemistry
Lithography
1
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6
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Electron optical column for high speed nanometric lithography
1986
Microelectronic Engineering
Norio Saitou
S Hosoki
Masahide Okumura
Takashi Matsuzaka
Genya Matsuoka
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Citations (6)
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