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Jay Senkevich
Jay Senkevich
Chonbuk National University
Materials science
Chemical vapor deposition
Copper
Inorganic chemistry
Barrier layer
5
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4
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Pore Sealing for Low-k Delectric Integration into Integrated Circuits
2006
Timothy S. Cale
Christopher Jezewski
Dae-Lok Bae
Jay Senkevich
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Substrate-dependent Copper Electroless Deposition
2006
Young-Soon Kim
Hyung-Il Kim
Joong-Hee Cho
Hyung Kee Seo
Gil-Sung Kim
Hyung-Shik Shin
Jay Senkevich
Gregory A. Ten Eyck
Toh-Ming Lu
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Erratum: Direct Copper Electroless Deposition on a Tungsten Barrier Layer for Ultralarge Scale Integration [ J. Electrochem. Soc. , 152 , C89 (2005) ]
2005
Journal of The Electrochemical Society
Young-Soon Kim
Dae-Lok Bae
Hoichang Yang
Hyung-Shik Shin
Geummi Wang
Jay Senkevich
Toh-Ming Lu
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A Pore Sealing CVD Polymer for Ultralow k Dielectrics
2004
Christopher Jezewski
Christopher J. Wiegand
D.-X. Ye
A. Mallikarjunan
Deli Liu
Chowming Jin
W. A. Lanford
G.-C. Wang
Jay Senkevich
Toh-Ming Lu
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Effective pore sealing of ultralow-k dielectrics
2004
Christopher Jezewski
W. A. Lanford
Christopher J. Wiegand
Jay Senkevich
Toh-Ming Lu
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Citations (3)
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