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Hong Seong Gil
Hong Seong Gil
Sungkyunkwan University
Materials science
Analytical chemistry
Ion beam
Inductively coupled plasma
Volumetric flow rate
2
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Radical Flux Control in Reactive Ion Beam Etching (RIBE) by Dual Exhaust System
2022
Applied Surface Science
Doo San Kim
Yun Jong Jang
Ye Eun Kim
Hong Seong Gil
Hee Ju Kim
You Jin Ji
Hyung-Yong Kim
Inho Kim
Myoung Kwan Chae
Jong-Chul Park
Geun Young Yeom
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Cyclic etching of silicon oxide using NF3/H2 remote plasma and NH3 gas flow
2021
Plasma Processes and Polymers
You Jung Gill
Doo San Kim
Hong Seong Gil
Ki-Hyun Kim
Yun Jong Jang
Ye Eun Kim
Geun Young Yeom
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