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Inho Kim
Inho Kim
Samsung
Materials science
Analytical chemistry
Ion beam
Inductively coupled plasma
Volumetric flow rate
2
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Radical Flux Control in Reactive Ion Beam Etching (RIBE) by Dual Exhaust System
2022
Applied Surface Science
Doo San Kim
Yun Jong Jang
Ye Eun Kim
Hong Seong Gil
Hee Ju Kim
You Jin Ji
Hyung-Yong Kim
Inho Kim
Myoung Kwan Chae
Jong-Chul Park
Geun Young Yeom
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Machine learning aided profile measurement in high-aspect-ratio nanostructures
2021
Inho Kim
Yoonsung Bae
Seoungho Gwak
Euiseok Kum
Taeyong Jo
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