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Michael Faeyrman
Michael Faeyrman
KLA-Tencor
Metrology
Real-time computing
Process control
Throughput
Wafer
2
Papers
15
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Technique permettant de controler le mesalignement
2002
Ibrahim Abdulhalim
Mike Adel
Michael Friedmann
Michael Faeyrman
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Manufacturing considerations for implementation of scatterometry for process monitoring
2000
John A. Allgair
David C. Benoit
Robert R. Hershey
Lloyd C. Litt
Ibrahim Abdulhalim
William Braymer
Michael Faeyrman
John C. Robinson
Umar K. Whitney
Yiping Xu
Piotr Zalicki
Joel L. Seligson
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Citations (15)
1